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                  圖形化襯底DPSS

                  2014-09-02

                  2"DPSS

                  Inspection

                  Item

                  Detail

                  Spec

                  Description

                  SEM
                  Image
                  Inspection

                  Width

                  Average

                  2.70±0.15um

                  Flat-top shaped pattern not allowed

                  Unif.

                  5%

                  Height

                  Average

                  1.65±0.15um

                  Unif.

                  5%

                  Scope Inspection

                  Particle

                  50um*

                  100ea

                  No visible particle on wafer
                  The total lens should be less than 3mm

                  [50um,250um]*

                  30ea

                  [250um,500um]*

                  20ea

                  [500um,1500um]*

                  10ea

                  1500um*

                  0

                  Pattern Missing

                  50um*

                  80ea

                  The total length shoud be less than 2mm

                  [50um,250um]*

                  30ea

                  [250um,500um]*

                  15ea

                  [500um,1500um]*

                  8ea

                  1500um*

                  0

                  Pattern Fail

                  50um*

                  80ea

                  [50um,250um]*

                  30ea

                  [250um,500um]*

                  15ea

                  [500um,1500um]*

                  8ea

                  1500um*

                  0

                  Scratch

                  1.2mm

                  7ea

                  width60um and lenth1.2mm should be judged as 1ea
                  if the pattern link happenes in the nearest 20 patternes area from the scratch,the pattern link should not be counted

                  Edge Bead

                  Edge Bead

                  1.8mm

                  The pattern failed within the 1.8mm area from the wafer edge should not be counted
                  The non-pattern area should be less than1mm from the wafer edge

                  Abnormal Shape

                  Abnormal Shape

                  3%

                  Total area of abormal shape pattern should be less than 3%

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