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                  6寸藍寶石襯底

                  2018-10-29

                  藍寶石晶片

                  Item

                  6"

                  Unit

                   Dimension

                  Diameter:

                  150 ± 0.2

                  mm

                  Thickness:

                  1300 ± 20

                  um

                  Primary Flat:

                  47.51.0

                  mm

                  Orientation

                  Surface-cut:

                  C plane : Tilt 0.2°±0.1° in M axis /

                  ~

                  Primary Flat:

                  A plane : 0° ± 0.15°

                  ~

                  Flatness

                  Bow:

                   0 ~ (-10)

                  um

                  Warp:

                   20

                  um

                  Total Thickness Variation (TTV):

                   10

                  um

                  LTV

                  2.5

                  um

                  Front side Roughness

                  0.2

                  nm

                  Back side Roughness

                  0.8-1.2

                  um

                  Cleanliness

                  No particles and fingerprints

                  ~

                  4.Material Quality

                  High-purity mono-crystal Al2O3

                  ~

                  5.Package

                  Wafers are packed in cleaned wafer cassettes containing 25 wafers under clean room environment.

                  ~

                  6.Trace Ability

                  Wafers shall be traceable with respect to cassette number. The wafer box should be marked with a removable label showing the date, the cassette number and the quantity.

                  ~

                  7.Laser Mark

                  Front or Back side

                  ~


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